COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS SUCH AS FILMS INCLUDING SILICON, SILICON NITRIDE, SILICON DIOXIDE AND/OR SILICON-OXYNITRIDE

摘要

Silicon precursors for forming silicon-containing films in the manufacture of semiconductor devices, such as low dielectric constant (k) thin films, high k gate silicates, low temperature silicon epitaxial films, and films containing silicon nitride (Si₃N₄), siliconoxynitride (SiO_xN_y) and/or silicon dioxide (SiO₂). The precursors of the invention are amenable to use in low temperature (e.g., 500° C.) chemical vapor deposition processes, for fabrication of ULSI devices and device structures.