METHOD FOR PRODUCING ZNO FILM, METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE FILM, ZNO FILM, AND TRANSPARENT CONDUCTIVE FILM

摘要

It is possible to obtain a ZnO film having superior crystallinity by means of this method for producing a ZnO film, said method having: a sputtering step for forming a ZnON film on a substrate by means of sputtering in a nitrogen-containing atmosphere; and an annealing step for crystallizing the obtained ZnON film by annealing.