首页> 外国专利> ZINC OXIDE NANOROD, METHOD AND APPARATUS FOR MANUFACTURING A ZINC OXIDE NANOROD USING METAL TRANSFER DEPOSITION, AND ELECTROLUMINESCENT DISPLAY NANOROD USING THE ZINC OXIDE NANOROD

ZINC OXIDE NANOROD, METHOD AND APPARATUS FOR MANUFACTURING A ZINC OXIDE NANOROD USING METAL TRANSFER DEPOSITION, AND ELECTROLUMINESCENT DISPLAY NANOROD USING THE ZINC OXIDE NANOROD

机译:氧化锌纳米线,通过金属转移沉积制造氧化锌纳米线的方法和装置,以及使用氧化锌纳米线的电致发光显示纳米线

摘要

Disclosed are a zinc oxide nanorod, a method and apparatus for manufacturing a zinc oxide nanorod using metal transfer deposition, and an electroluminescent display nanorod using the zinc oxide nanorod. According to one embodiment of the present invention, the method for manufacturing a zinc oxide nanorod using metal transfer deposition comprises the steps of: positioning zinc metal in the source region of a reaction furnace, and positioning a growth substrate in the growth region of the reaction furnace; heating the inside of the reaction furnace so to convert the zinc metal into a molecular state through evaporation; transferring the molecular zinc metal into the growth region using a carrier gas supplied to the reaction furnace; and allowing oxygen gas, which is directly injected into the growth region, to react with the molecular zinc metal over the growth substrate.
机译:公开了氧化锌纳米棒,使用金属转移沉积制造氧化锌纳米棒的方法和设备以及使用氧化锌纳米棒的电致发光显示器纳米棒。根据本发明的一个实施方式,使用金属转移沉积制造氧化锌纳米棒的方法包括以下步骤:将锌金属放置在反应炉的源区中,以及将生长衬底放置在反应的生长区中。炉;加热反应炉的内部,以通过蒸发将锌金属转化为分子态。使用供应到反应炉的载气将分子锌金属转移到生长区域中;使直接注入生长区域的氧气与生长衬底上方的分子锌金属反应。

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