Optical component for integrating the optical microscopy into the atomic force microscopy maintaining maximal performance of the atomic force microscopy.

摘要

The invention concerns a device combining atomic force microscope AFM techniques with optical imaging techniques. Said device comprising:- a light source (48) and a light detector (50) for optically imaging a sample (41),- a sample holder (42) disposed in the light path between the light source and the sample,- an AFM cantilever (40) for measuring the topography of the sample laid (41) on a side of the sample holder (42),- an AFM measuring means (45, 46) for measuring the cantilever (40) variations,- a scanning means (43) for moving the sample holder (42) with respect to the AFM cantilever (40).