HYBRID TCS-SIEMENS PROCESS EQUIPPED WITH 'TURBO CHARGER' FBR. METHOD OF SAVING ELECTRICITY AND EQUIPMENT COST FROM TCS-SIEMENS PROCESS POLYSILICON PLANTS OF CAPACITY OVER 10,000 MT/YR

摘要

PURPOSE: A hybrid trichloro silane(TCS)-siemens process using a turbo charger-fluidized bed reactor(FBR) and a method for saving electricity and equipment costs from a TCS process-based polysilicon plants of capacity over 10,000 mt/yr are provided to convert silicon tetrachloride from a chemical vapor deposition reactor into TCS. CONSTITUTION: An FBR(4-5) is prepared. A cooling jacket surrounds the external wall of the lower side of the FBR. A gas distributing plate is installed at the lower side of the FBR and includes gas injectors. An expanding region is expanded from the lower wall of the FBR. An internal cooling coil is installed at the upper inside of the FBR. A turbo charger hopper is installed on the upper side of the FBR. A turbo charger injector is installed between the turbo charger hopper and the upper dome part of the FBR. A metallurgical grade silicon injector injects metallurgical grade silicon. Other components are further prepared for a hybrid trichloro silane(TCS)-siemens process.