PREPARATION METHOD FOR CIS-BASED COMPOUND THIN FILM BY USING RAPID THERMAL PROCESSING AND PREPARATION METHOD FOR THIN FILM SOLARCELL MANUFACTURED BY USING THE CIS-BASED COMPOUND THIN FILM

摘要

PURPOSE: A method for manufacturing a CIS based compound thin film using a rapid thermal process and a method for manufacturing a thin film solar cell using the CIS based compound thin film are provided to improve the efficiency of a light absorbing layer by increasing the crystallization of the CIS based compound thin film. CONSTITUTION: A CIS based compound thin film is formed on a substrate. A thermal selenization process of the CIS based compound thin film is performed by using a rapid thermal process. The CIS based compound thin film includes a CIS compound thin film, a CIGS compound thin film, or CZTS compound thin film. Se vapor is produced by heating Se metal. Se is vacuously deposited on the CIS based compound thin film.