SILICATE GLASS COATED MICROFLUIDIC CHANNEL THROUGH HYDROLYTIC PHASE CONVERSION PROCESS OF PRECERAMIC POLYMERS

摘要

PURPOSE: The manufacturing of silicate microfluidic channel based on the phase transition hydration process of ceramic precursors is provided to improve solvent resistance characteristics regardless of the thickness of coatings. CONSTITUTION: A composition is obtained by mixing photo-initiators or thermosetting initiators with an inorganic polymer precursor diluted solution. The composition is coated on a substrate on which silicon polymer channels or patterns are formed. An inorganic polymer coating layer is formed and cured. The cured coating layer is immersed in an alkali solution to be converted into hydrophilic silicate. The inorganic polymer is selected from a group including polycarbosilane, polysilazane, polyborazine, poly silses siloxane, or the mixture of the same.