ANALYSIS SYSTEM USING AN INTERFEROMETER AND A CONTROL METHOD THEREOF, CAPABLE OF OPTIMIZING PERFORMANCE OF AN INTERFEROMETER BY ADJUSTING A LENGTH OF A CAVITY

摘要

PURPOSE: An analysis system using an interferometer and a control method thereof are provided to improve the interference performance of an interferometer by changing a length of a cavity according to a wavelength of incident lights.;CONSTITUTION: An analysis system using an interferometer comprises a beam irradiating device, a beam collecting device, a cavity(200), a path setting device(400), and an analysis device(300). The beam irradiating device irradiates laser beams to a target. The beam collecting device collects the beam emitted from the target. The cavity reflects the collected beams to an input terminal or outputs by resonating. The path setting device transmits the transmitted beams from the beam collecting device to the cavity and output beams output from the cavity to the analysis device. The analysis device analyzes properties of the target by using the beams output from the cavity.;COPYRIGHT KIPO 2012