FILTERING DEVICE FOR A SINGLE CRYSTAL GROWING DEVICE CAPABLE OF PREVENTING THE CONTROL MALFUNCTION OF INTERNAL PRESSURE IN THE SINGLE CRYSTAL GROWING DEVICE AND THE SINGLE CRYSTAL GROWING DEVICE INCLUDING THE FILTERING DEVICE

摘要

PURPOSE: A filtering device for a single crystal growing device and the single crystal growing device including the filtering device are provided to prevent filter inside etching caused by oxide as the inside of a filter is formed with an acid-resistant material.;CONSTITUTION: A body unit(310) includes a filter for air flowing from a chamber. A cover unit(330) is placed on an upper side of the body unit. The body unit includes a high temperature corrosion resistance material. A combining device(340) is placed on a lower part of the filter.;COPYRIGHT KIPO 2013