Laser Interferometer Compensating Apparatus Using Extended Kalman Filter

摘要

The present invention relates to a heterodyne laser interferometer error correction apparatus using the extended Kalman filter , a heterodyne laser from the pre-processing unit based on a signal input from the operation unit and Im and Ir interferometer signal operation unit for generating a measurement signal , using the reference signal and the measurement signal output from the phase information , and phase information database for storing information of the extended Kalman filter noise variance is noise variance information and the target object traveling speed information to enable a more accurate measurement of the target by providing a heterodyne laser interferometer error correction device comprising the extended Kalman filter for correcting the error using .