Method for fabrication of patterned micro/nano architectures by means of directional photofluidization of polymer

摘要

The present invention relates to a micro structure manufacturing method of a patterned using a developing solution heat aromatic mineral oil of the polymer. More particularly to bond the rubber mold and the substrate comprising a fine pattern comprising: making a microfluidic device, the method comprising injecting a polymer solution in the microfluidic device, the polymer line array Dry the polymer according to the pattern of the micro-fluid channel making the coating step, the metal on the polymer array structure is controlled by controlling the shape and size of the micro-structure array by the light irradiation to induce directional mineral oil solution heat developing, the directional mineral oil solution heat to the and to selectively remove the polymer as the polymer is composed of shaped microstructure array production method including the step of transferring the microstructure array. ; The present invention is fluidized orientation is determined and precise control of the shape and size of the polymeric array mold having a varied nature that is, directional mineral oil solution heat developing deformation degree by the fluidized and thus depending on the irradiation time of the light by the polarization of the light by transferring the mold can be controlled is arranged in a regular shape and size produced by the different micro-structure the large area. ; Aromatic mineral oil solution heat development, the patterned microstructure array, capillary