METHOD FOR MEASURING A FILM THICKNESS OF A SAMPLE WHERE A TEXTURE IS FORMED, CAPABLE OF OBTAINING TEXTURE STRUCTURE INFORMATION THROUGH A RELATION BETWEEN A FLATTEN SURFACE AND REFLECTIVITY OF A SAMPLE IN WHICH A TEXTURE IS FORMED

摘要

PURPOSE: A method for measuring a film thickness of a sample where a texture is formed is provided to measure a thickness of a thin film formed on a textured surface and to control a process by confirming a reflective state of a solar battery surface.;CONSTITUTION: A method for measuring a film thickness of a sample where a texture is formed is as follows. A reference reflectivity of a basic sample having a flatten surface in which a texture is nor formed is measured(S100). A first reflectivity of a first sample in which the texture is formed on a surface of the basic sample is measured(S110). Texture structure information is obtained from a relation between the reference reflectivity and first reflectivity(S120). A second reflectivity of a second sample in which the texture is formed on the surface of the first sample is measured(S130). A third reflectivity of a third sample in which a thin film is formed on the surface of the basic sample is obtained from the texture structure information and second reflectivity(S140). The thickness of the thin film formed on the surface of the first sample from the third reflectivity(S150).;COPYRIGHT KIPO 2012