AGGREGATE OF ELECTRONIC DEVICE CHIPS, ELECTRONIC DEVICE CHIP, AGGREGATE OF DIFFRACTION GRATING LIGHT MODULATORS, AND DIFFRACTION GRATING LIGHT MODULATOR

摘要

An object of the present invention, the diffraction grating by the static electricity-to provide a light modulation device - a diffraction grating provided with a means for preventing ensure that the destruction of the light modulation device. ; Is installed to the lower electrode, the fixed electrode and the movable electrode and the electrical connection to the external circuit of a belt-like support to the lower electrode above is exposed to the outside, it is made of a connection terminal 30 electrically connected to the movable electrode, connection terminal 30, the through diffraction is based on the application of a voltage to the movable electrode and applying a voltage to the lower electrode grating is formed by the movable electrode and the fixed electrode from an external circuit grating-optical modulation elements are multiple support in the optical modulator, each of the diffraction grating-grating formed is formed on the surface of the optical modulator has to surround the connection terminal 30 is a protective electrode (40) is further provided. ; The diffraction grating light modulator, the connection terminal portion, the protective electrode, the movable electrode, the support