MANUFACTURING MEHTOD OF NANO METAL STRUCTURE USING DOT SIZE CONTROL METHOD FOR NANO METAL STRUCTURE

摘要

PURPOSE: A dot-size controlling method for a nano metal structure, a manufacturing method for the nano metal structure using the same, and an ion irradiation system for fin metal processing are provided to form nano-dots with desired shapes and sizes by implementing an ion irradiation process based on a threshold ion dose. CONSTITUTION: A threshold ion dose for target metal is determined based on the linear function of data with respect to the nano-dot size values of metal structures on a substrate. The nano-dot size values are varied according to the interval and the amount of ion irradiation. The amount of ion irradiation with respect to a metal layer is controlled in order to control the nano dot sizes of the metal structures on the substrate. The metal layer is eliminated.