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METHOD FOR FABRICATING FEW-LAYERED GRAPHENE OXIDE-BASED REDUCED GRAPHENE OXIDE FIELD EFFECT TANSISTOR BASED ON BOTTOM CONTACTS

机译:基于底部接触的基于层状氧化石墨烯的还原氧化石墨烯场效应晶体管的制造方法

摘要

PURPOSE: A method for fabricating a field effect transistor based on a reduced graphene oxide using a floor contact graphene oxide is provided to efficiently manufacture a graphene oxide channel having a single layer or a few layers by using solution pre-processing and spin coating which can improve solvent dispersion. CONSTITUTION: A silicon oxide substrate(120) is formed on a silicon substrate(110). An electrode(130) reacting with a source electrode and a drain electrode is formed on the silicon oxide substrate. A graphene oxide dispersion solution is coated on the substrates. A graphene oxide is adsorbed between the drain electrode and the source electrode. The adsorbed graphene oxide is reduced.
机译:目的:提供一种使用地板接触氧化石墨烯制造基于还原氧化石墨烯的场效应晶体管的方法,以通过使用溶液预处理和旋涂技术有效地制造具有单层或几层的氧化石墨烯沟道。提高溶剂分散性。构成:氧化硅衬底(120)形成在硅衬底(110)上。与源极和漏极反应的电极(130)形成在氧化硅衬底上。将氧化石墨烯分散液涂覆在基底上。氧化石墨烯吸附在漏电极和源电极之间。吸附的氧化石墨烯被还原。

著录项

  • 公开/公告号KR101190219B1

    专利类型

  • 公开/公告日2012-10-16

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20110007980

  • 发明设计人 이효영;서소현;이정현;

    申请日2011-01-26

  • 分类号H01L21/335;H01L29/778;

  • 国家 KR

  • 入库时间 2022-08-21 17:07:22

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