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METHOD FOR FABRICATING FEW-LAYERED GRAPHENE OXIDE-BASED REDUCED GRAPHENE OXIDE FIELD EFFECT TANSISTOR BASED ON BOTTOM CONTACTS
METHOD FOR FABRICATING FEW-LAYERED GRAPHENE OXIDE-BASED REDUCED GRAPHENE OXIDE FIELD EFFECT TANSISTOR BASED ON BOTTOM CONTACTS
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机译:基于底部接触的基于层状氧化石墨烯的还原氧化石墨烯场效应晶体管的制造方法
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摘要
PURPOSE: A method for fabricating a field effect transistor based on a reduced graphene oxide using a floor contact graphene oxide is provided to efficiently manufacture a graphene oxide channel having a single layer or a few layers by using solution pre-processing and spin coating which can improve solvent dispersion. CONSTITUTION: A silicon oxide substrate(120) is formed on a silicon substrate(110). An electrode(130) reacting with a source electrode and a drain electrode is formed on the silicon oxide substrate. A graphene oxide dispersion solution is coated on the substrates. A graphene oxide is adsorbed between the drain electrode and the source electrode. The adsorbed graphene oxide is reduced.
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