METHOD purification of exhaust gases of Silao

摘要

FIELD: process engineering.;SUBSTANCE: invention relates to methods of cleaning waste gases of silane SiH₄. Proposed method comprises bringing air oxygen in interaction with silane to form solid silicon dioxide to be separated by filtration thereafter. Note here that waste gases containing silane are mixed with air and fed into ''tunnel burner''-type reactor furnished with jacket with heat carrier. Gas stays in reactor for 1 to 10 s at silane-to-oxygen ratio of 1:2 to 1:10.;EFFECT: removing silane to content of not over 0,001 vol %.;3 cl, 2 dwg, 3 tbl, 3 ex