CNT-BASED INTEGRAL MICROMECHANICAL ACCELERATION MEASURING GYROSCOPE

摘要

FIELD: medicine.;SUBSTANCE: method is implemented by introducing a semiconductor layer of additional inertial mass placed on the additional inertial mass directly, a secondary semiconductor square loop placed on the square loop directly, two movable semiconductor electrodes represented in the form of plates with one-side corrugated structures and gapped with a semiconductor substrate, a secondary fixed semiconductor electrode placed on the substrate directly, four auxiliary flexible beams gapped with the semiconductor substrate, six semiconductor clamps four of which are placed on supports directly, and another two - on the two movable electrodes with the planar fixed electrode forming plate condensers in a plane of their plates via the lateral clearances with the square loop, while the flexible beams are CNT-based.;EFFECT: enabled measurement of angular rates and accelerations along the axes X and Y mutually perpendicular in the plane of the substrate, and along the axis Z perpendicular to the plane of the substrate.;2 dwg