Micro-electromechanical translation vibrator system, has acoustic resonator arranged such that resonance frequency of acoustic resonator is adapted to natural frequency of micro-electromechanical translation vibrator

摘要

The system (100) has a micro-electromechanical translation vibrator (110) comprising a primary side (111) in which a tubular acoustic resonator (120) is arranged such that resonance frequency of the acoustic resonator is adapted to a natural frequency of the micro-electromechanical translation vibrator. The acoustic resonator comprises apertures such that the apertures face a swinging member (112) of the micro-electromechanical translation vibrator. The micro-electromechanical translation vibrator is designed to be driven electrostatically, electromagnetically or piezoelectrically. An independent claim is also included for a method for manufacturing a micro-electromechanical translation vibrator system.