Measurement of the positions of the centers of curvature of optical surfaces of a multi-lens optical system

摘要

The invention relates to a method for measuring the positions of centers of curvature (k1, k2, k3) of optical surfaces (s1, s2, s3) of a multi-lens optical system (62). First, the distances between the surfaces (s1, s2, s3) along a reference axis (34) using an interferometer (24) is measured. Subsequently, the centers of curvature (k1, k2, k3) of the surfaces (s1, s2, s3) using an optical angle measuring device (22) is measured. In the measurement of the position of the said centre of curvature of an inside of the optical system (62) lying surface (s2, s3), the measured positions of the centers of curvature (k1, k2) of the between said area (s2, s3) and the angle measuring device (22) lying surfaces (s1, s2) and the previously measured distances between the surfaces (s1, s2, s3) is taken into account computationally. In this way, a particularly high measuring accuracy is achieved, because it does not have to be used on target distances.