Grill for use in X-ray-based system of medical device and in medical radiography system, has primary structure, which is inserted in carrier by directed etching tread and material

摘要

The grill has a primary structure, which is inserted in a carrier by a directed etching tread and a material. The primary structure has a material, which absorbs X-rays, and has a lower atomic number than gold. The material is made from tungsten or tantalum. The carrier is made from silicon or its compounds. The carrier is a silicon-on-insulator substrate. An independent claim is also included for a method for manufacturing a grill.