Component positioning system e.g. three-axis positioning system, has auxiliary units that are movably arranged with respect to carriage, relative to drive motions, and an additional deflection unit which is operated independently

摘要

The positioning system (1) has a main unit (3), side portions (26a,26b), and deflection units (16,17). The auxiliary units (34,35) are movably arranged with respect to the carriage (2), relative to the drive motions (32a,32b). An additional deflection unit (38) is operated independently by the additional drive units (52,53). The auxiliary drive trains (36,37) include a peripheral portion (45) or a transverse portion (46) arranged in T-shape, such that the additional stationary deflections units are looped with respect to reversal direction of a crossbeam (6).