Guide for positioning machine, particularly machine tool, positioning device or robot, has ultrasonic levitation oscillator and magnetic actuator which is antagonistically arranged for ultrasonic-levitation oscillator

摘要

The guide (10) has an ultrasonic levitation oscillator (12.1) and a magnetic actuator (14.1) which is antagonistically arranged for the ultrasonic-levitation oscillator. The magnetic actuator has a magnetic active direction and the ultrasonic-levitation oscillator has an ultrasonic-active direction. The magnetic-active direction forms an angle of 170 degree with the ultrasonic-active direction. An independent claim is also included for a method for operating a guide.