Micro system e.g. micro electromechanical system, for use in e.g. electrical engineering, has anchor structure provided at carrier substrate and/or at electrical component, where membrane is fixed to anchor structure in form-fit manner

摘要

The system (10) has a carrier substrate (11), and an electrical component (14) i.e. microelectrode, arranged on the substrate. A membrane is provided for partially covering the substrate, and an anchor structure is provided at the substrate and/or at the electrical component, where the membrane is fixed to the anchor structure in a form-fit manner. An insulation layer i.e. negative-photoresist layer, is attached to the substrate and/or the electrical component and made from inorganic material. The substrate is made from glass, and the membrane is made from polymer. An independent claim is also included for a method for manufacturing a microsystem.