Micromechanical sensor for measuring rotational speeds of e.g. global positioning system navigational devices, has compensation units compensating disturbing forces acting on driving units, and measuring unit measuring speed of rotation

摘要

The sensor has multiple seismic masses (2a, 2b) connected by a spring element (3). Multiple driving units (1a, 1b) are used for driving the seismic masses in a plane (E). The driving units are connected to one of the seismic masses. Multiple compensation units (5a, 5b) compensate disturbing forces acting on the driving units perpendicular to the plane. A measuring unit (M) measures rotational speed. The compensating units are arranged perpendicular in a region below or above the driving units being spaced from the plane. The compensating and driving units are provided with electrodes. Independent claims are also included for the following: (1) a method for measuring rotational speed by a micromechanical sensor (2) a method for manufacturing a micromechanical sensor.