SHADING CORRECTION CHART INSPECTING METHOD OF IMAGE SENSOR USING CHART COMPARISON, INSPECTING DEVICE AND IMAGE SENSOR

摘要

PROBLEM TO BE SOLVED: To solve the problem that quality determination of an image sensor becomes difficult since (1) a value of a standard deviation of output luminance for determining a good quality range becomes large and (2) a difference between an average value of luminance in a sub-scanning direction of a target pixel and an average value of luminance of a peripheral pixel of the target pixel becomes large in a boundary of sensor chips if there is a large difference in the output luminance between the sensor chips due to influence of a sensitivity difference of the sensor chips when the image sensor is constituted of the plurality of sensor chips in an adjustment and a test of the image sensor.SOLUTION: A difference value between output luminance data of a first shading correction chart of an image sensor and output luminance data of a second shading correction chart is calculated. When there is a part of a prescribed threshold or more in the difference value, a foreign matter and a cut are detected to be present on the shading correction chart in the part.