The optical component supporting structure, optical system, being the optical component supporting structure containment the production

摘要

PROBLEM TO BE SOLVED: To provide: an optical element holding unit that can adjust the position and shape of an optical element while suppressing complication of an entire unit; an optical system; an exposure unit; and a device manufacturing method.;SOLUTION: An optical element-holding unit 40 holding a first mirror 26 includes three holding mechanisms 51, 52, and 53 respectively holding parts 41, 42, and 43 to be held, which are provided on the first mirror 26. Each of holding mechanisms 51 to 53 is provided with link mechanisms 54 to 56 capable of moving the parts 41 to 43, respectively, in six flexible directions. The holding mechanisms 51 to 53 are each driven on the basis of control information from a controller, whereby the adjustment of the position and shape of the first mirror 26 is executed.;COPYRIGHT: (C)2010,JPO&INPIT