CHECKER AND CONVEYANCE SYSTEM WITH CHECKER

摘要

PROBLEM TO BE SOLVED: To provide a checker capable of vibrating an object to be inspected at a proper position, and certainly detecting vibration and sound waves to be generated from the object to be inspected.;SOLUTION: A checker 29 supports an object W to be inspected by a support base 22, and vibrates the object W to be inspected by a vibrator 20. Then, the checker 29 detects signals (such as sound waves, sound pressure and vibration) generated due to vibration of the object W to be measured by a signal detector 21, and an analyzer 23 inspects the object W to be measured on the basis of the detected signals of the signal detector 21. The support base 22 includes a lifting device 22b, and the checker 29 controls distance between the object W to be inspected and the vibrator 20 by the lifting device 22b.;COPYRIGHT: (C)2013,JPO&INPIT