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Wavelength irradiating the laser light of 1064nm
Wavelength irradiating the laser light of 1064nm
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机译:照射1064nm激光的波长
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摘要
PROBLEM TO BE SOLVED: To provide a manufacturing method of a transparent substrate having a tin oxide thin film which can be patterned without any problem with an ablation phenomenon caused even if the substrate is irradiated with a laser beam low energy.;SOLUTION: By the manufacturing method of a transparent substrate with a circuit pattern, a circuit pattern is formed on the transparent substrate by the irradiation of a laser beam of a wavelength of 1,064 nm on the transparent substrate with a thin film having a transparent conductive film with a carrier concentration of 5×1019/cm3 or higher on the transparent substrate.;COPYRIGHT: (C)2007,JPO&INPIT
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机译:解决的问题:提供一种具有氧化锡薄膜的透明基板的制造方法,该透明基板即使被低能量的激光束照射也可以形成图案而不会引起烧蚀现象。制造具有电路图案的透明基板的方法,通过在透明基板上照射具有载流子浓度的透明导电膜的薄膜,在透明基板上照射波长为1,064nm的激光,在透明基板上形成电路图案。透明基板上的5×10 19 Sup> / cm 3 Sup>或更高; COPYRIGHT:(C)2007,JPO&INPIT
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