Control method of control control equipment, enlargement observation system, and enlargement observation device

摘要

P To reduction operational burden for separately setting up the magnification of a plurality of variable POWER devices which are needed for observing an observation object with a desired observation magnification. PSOLUTION: A magnification observation device has the plurality of variable POWER devices (Z revolver 6 and two-dimensional scanning mechanism 3) which change the observation magnification for a sample 8, and the comprehensive observation magnification as the whole device when observing the sample 8 is determined by the product of magnification of each variable POWER device. When an input part 16 acquires directions of the comprehensive observation magnification and a computer 12 for control determines and outputs the combination of magnification of each variable POWER device for performing observation of the sample 8 with the comprehensive observation magnification concerning the directions with the magnification observation device based ON the comprehensive observation magnification. PCOPYRIGHT: (C)2009 and JPO& INPIT