Being production manner, and the mechanical sealing device of the SiC sintering body ring for the mechanical sealing device and the SiC sintering body ring for the mechanical sealing device and the SiC

摘要

PPROBLEM TO BE SOLVED: To provide a mechanical seal device which is excellent in sliding characteristics and mechanical characteristics such as strength and fracture toughness, prevents the falling-off of SiC particles or the like by suppressing embrittlement, and is usable as a liquid shaft seal device of rotating equipment using a liquid such as a pump; and to provide an SiC-based sintered compact ring to be used in the mechanical seal device and a method for manufacturing the same. PSOLUTION: This mechanical seal device includes an SiC-based sintered compact rotating ring and a carbon-based seat ring, where the SiC-based sintered compact ring has following properties: the average crystal grain size is ≤5 μm; the porosity is ≤5.0%; the average pore size is ≤2.0 μm; and the resistivity is ≤1 Ω cm at a room temperature. This ring is manufactured by granulating and forming an SiC raw material powder having ≥97% SiC purity and containing ≥92% 3C crystal, then sintering under pressure environment by press-sintering method. PCOPYRIGHT: (C)2010,JPO&INPIT