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RESONANT DEVIVE WITH PIEZORESISTIVE DETECTION AND WITH A RESONATOR CONNECTED ELASTICALLY TO THE SUPPORT OF THE DEVICE, AND METHOD FOR MANUFACTURING THE DEVICE
RESONANT DEVIVE WITH PIEZORESISTIVE DETECTION AND WITH A RESONATOR CONNECTED ELASTICALLY TO THE SUPPORT OF THE DEVICE, AND METHOD FOR MANUFACTURING THE DEVICE
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机译:具有磁阻检测和谐振器的谐振装置,该谐振器弹性地连接到该装置的支撑件,以及制造该装置的方法
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摘要
A resonant device with piezoresistive detection includes a resonator connected elastically to the support of the device. The device includes: a support; a suspended resonator, which moves parallel to the plane of the support; means for actuating the resonator; and means for detecting the movement, including at least one piezoresistive gauge. The resonator is anchored to the support through at least one flexurally elastic element, to enable the threshold where a non-linear displacement regime appears to be raised. The device can be manufactured by a surface technology, and applies notably to resonant mass sensors.
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