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SEM TYPE DEFECT OBSERVATION DEVICE AND DEFECT IMAGE ACQUIRING METHOD
SEM TYPE DEFECT OBSERVATION DEVICE AND DEFECT IMAGE ACQUIRING METHOD
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机译:SEM型缺陷观察装置及缺陷图像获取方法
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摘要
The present invention enables provision of a defect observation device that reduces wait time from an end of pickup of a reference image and accompanying processing to a start of pickup of a defect image compared to conventional ones by making a pixel count resolution of the reference image be low compared to a pixel count of the defect image in an image pickup unit using an electronic microscope for automatic fine defect classification, whereby a throughput enhanced compared to those of conventional ones can be achieved.
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