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Method and device for the infiltration of a structure of a porous material by chemical vapour deposition
Method and device for the infiltration of a structure of a porous material by chemical vapour deposition
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机译:通过化学气相沉积渗透多孔材料结构的方法和装置
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摘要
A method and a device for infiltration of a structure made of a porous material by chemical vapor deposition. According to the method, a first face of the porous material structure is exposed to a gaseous flow, and the second face is maintained at least partially free from any contact.
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