首页> 外国专利> SEMICONDUCTOR CHIP MANUFACTURED IN A SEMICONDUCTOR INSTALLATION AND INCLUDING IN A SEMICONDUCTOR TUNNEL SET-UP OF THE RECORDING OF AN EXTREME ULTRA VIOLET LITHOGRAPHY SYSTEM FOR THE USE OF A SUMMARY OF THE SUBSIDENCE OF THE VIEW OF THE SUBSIDENCE OF THE VIEW OF THE SUBSIDENCE OF THE SUBSIDENCE OF THE VIEW.

SEMICONDUCTOR CHIP MANUFACTURED IN A SEMICONDUCTOR INSTALLATION AND INCLUDING IN A SEMICONDUCTOR TUNNEL SET-UP OF THE RECORDING OF AN EXTREME ULTRA VIOLET LITHOGRAPHY SYSTEM FOR THE USE OF A SUMMARY OF THE SUBSIDENCE OF THE VIEW OF THE SUBSIDENCE OF THE VIEW OF THE SUBSIDENCE OF THE SUBSIDENCE OF THE VIEW.

机译:在半导体装置中制造的半导体芯片,并包括在使用超级紫光光刻系统记录的半导体隧道装置中,以供使用。的观点。

摘要

机译:

著录项

  • 公开/公告号NL1039463C2

    专利类型

  • 公开/公告日2013-09-16

    原文格式PDF

  • 申请/专利权人 BOK EDWARD;

    申请/专利号NL20121039463

  • 发明设计人 BOK EDWARD;

    申请日2012-03-13

  • 分类号H01L21/67;

  • 国家 NL

  • 入库时间 2022-08-21 16:40:39

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