SELECTIVE REMOVAL OF THIN FILMS BY MEANS OF PULSED LASER RADIATION IN ORDER TO STRUCTURE THE THIN FILMS

摘要

The selective removal of thin films relates to a method for structuring chalcopyrite-based thin film solar cells by means of pulsed laser radiation by removing previously applied films. The invention relates to a structuring method that results in only low thermal loads on the film system to be structured due to laser irradiation. According to the invention, the structuring of the thin films is achieved in that a laser beam characterized by wavelength, pulse duration, and energy density distribution is directed at the side of the substrate opposite the thin film system and thus the removal of films of the thin film system is achieved. A preferred field of application is the structuring of thin film solar cells on a flexible substrate.