首页>
外国专利>
Method of determining stopping powers of design structures with respect to a traveling particle
Method of determining stopping powers of design structures with respect to a traveling particle
展开▼
机译:确定设计结构相对于行进粒子的停止功率的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A computer program product, comprising a computer readable storage device having a computer readable program code stored therein, said program code including an algorithm adapted to be executed by a computer to implement a method. First, design information of a design structure is provided including a back-end-of-line layer of an integrated circuit which includes N interconnect layers, wherein N is a positive integer. Next, each interconnect layer is divided into multiple pixels. Next, a first path of a traveling particle in a first interconnect layer of the N interconnect layers is determined. Next, M path pixels of the multiple pixels of the first interconnect layer on the first path of the traveling particle are identified, wherein M is a positive integer. Next, a first loss energy lost by the traveling particle due to its completely passing through a first pixel of the M path pixels is determined.
展开▼