Transmission electron microscopy system and method of operating a transmission electron microscopy system

摘要

A transmission electron microscopy system comprises: an illumination system (2), an objective lens system (13), a first projection system (21) imaging the diffraction plane (15) objective lens system into a first intermediate diffraction plane (25), a second projection system (41) imaging the first intermediate diffraction plane into a second intermediate diffraction plane (43), a first aperture (27) located in the first intermediate diffraction plane and having a central opening of a first radius (r1), and a bright field detector (45) located in the second intermediate diffraction plane and having a detection surface defined by an inner edge (49) of a second radius (r2), wherein the first radius and the second radius define a maximum angle and a minimum angle, respectively, relative to the optical axis of directions of bright field electrons traversing the sample plane and detectable by the bright field detector.