BIAXIAL SCANNER WITH A TELECENTRIC LENS, A LASER PROCESSING APPARATUS EMPLOYING THE BIAXIAL SCANNER, AND A METHOD FOR CORRECTING A TELECENTRIC ERROR RESULTING FROM THE STRUCTURE OF AN OPTICAL SYSTEM

摘要

PURPOSE: A biaxial scanner with a telecentric lens, a laser processing apparatus employing the biaxial scanner, and a telecentric error correcting method are provided to enable precise perpendicular processing by perpendicular incidence of light to an image forming plane and to form a symmetric optical spot on the image forming plane by correcting a telecentric error.;CONSTITUTION: A biaxial scanner comprises first deflection units(120,150) which deflect lights to a first direction and lead the deflected lights to the same position of a deflection mirror, a second deflection unit(130) including the deflection mirror that rotates to deflect the deflected lights in the first direction to a second direction, and a telecentric lens(140) arranged at the light exit side of the second deflection unit.;COPYRIGHT KIPO 2013