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PRESSURE SENSOR BASED ON A MICRO-OSCILLATOR DEVICE USING A THERMAL EFFECT AND A PRESSURE MEASURING METHOD USING THE SAME
PRESSURE SENSOR BASED ON A MICRO-OSCILLATOR DEVICE USING A THERMAL EFFECT AND A PRESSURE MEASURING METHOD USING THE SAME
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机译:基于具有热效应的微振荡器装置的压力传感器以及使用该传感器的压力测量方法
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摘要
PURPOSE: A pressure sensor based on a micro-oscillator device using a thermal effect and a pressure measuring method using the same are provided to obtain a subminiature pressure sensor of a micrometer size.;CONSTITUTION: A pressure sensor based on a micro-oscillator device using a thermal effect comprises an oscillator of a cantilever beam structure and a piezoelectric element. The oscillator of the cantilever beam structure is composed of a silicon substrate(11), silicon nitride layers(12), and an aluminum layer(130). The silicon nitride layers are deposited on the both surface of the silicon substrate. The aluminum layer is deposited on a doubly-clamped beam isolated by an etching process from a photo-lithography in the silicon nitride layer. The piezoelectric element oscillates the oscillator by electric signals.;COPYRIGHT KIPO 2013
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