PIEZOELECTRIC-MAGNETIC MICRO DEVICE CAPABLE OF BEING OPERATED WITHOUT POWER, AND A MAGNETIC SENSOR INCLUDING THE SAME, AND A MANUFACTURING METHOD OF THE PIEZOELECTRIC-MAGNETIC MICRO DEVICE

摘要

PURPOSE: A piezoelectric-magnetic micro device, and a magnetic sensor including the same, and a manufacturing method of the piezoelectric-magnetic micro device are provided to maximize a magnetoelectric effect generated in the piezoelectric-magnetic micro device.;CONSTITUTION: A piezoelectric-magnetic micro device comprises a supporting layer(100), a piezoelectric body(110), an insulating layer(120), and a magnetic thin film layer(130). The piezoelectric body includes a lower electrode layer(111), a piezoelectric thin film layer(113), and an upper electrode layer(115). The insulating layer covers the piezoelectric body. The magnetic thin film layer is formed on the insulating layer. The supporting layer, the piezoelectric body, and the insulating layer form a cantilever structure. The magnetic thin film layer is formed on a protruded portion of the cantilever structure.;COPYRIGHT KIPO 2013