MANUFACTURING DEVICE OF GAS PHASE CORE-SHELL NANOPARTICLES BY USING ELECTRON BEAM IRRADATION AT ROOM TEMPERATURE CAPABLE OF CONTROLLING COATING THICKNESS OF CORE-SHELL NANOPARTICLES AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A manufacturing device of gas phase core-shell nanoparticles and a manufacturing method thereof are provided to facilitate manufacturing of core-shell nanoparticles by irradiating electronic beam at room temperature and atmospheric pressure by equipping a shell material precursor generator, a core material generator, and a particle coating reactor.;CONSTITUTION: A manufacturing device of gas phase core-shell nanoparticles comprises a shell material precursor generating unit (10), a core material generating unit (20), a particle coating reactive part (30), a particle collector (40), and an electron beam radiating apparatus (50). The shell material precursor generating unit generates shell material precursor by working fluid. The core material generating unit generates core materials by working fluid. The particle coating reactive part forms core-shell nanoparticles by using shell material precursor and core materials flowed in from the shell material precursor generating unit and the core material generating unit. The particle collector collects core-shell nanoparticles manufactured from the particle coating reactive part. The electronic beam radiating apparatus irradiates electronic beam on the particle coating reactive part. The generation of shell material precursor vapor, core nanoparticles, decomposition of the shell material precursor and formation of the core-shell nanoparticles are performed by the working fluid at normal temperature and atmospheric pressure.;COPYRIGHT KIPO 2013;[Reference numerals] (32) Particle coating reactor; (40) Particle collector; (AA) Electronic beam radiating apparatus; (BB,DD) Working fluid; (CC) Carrier gas