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NANOPATTERN FORMATION METHOD CAPABLE OF FORMING NANOPATTERNS WITHOUT A NANOMASK AND A LITHOGRAPHIC PROCESS
NANOPATTERN FORMATION METHOD CAPABLE OF FORMING NANOPATTERNS WITHOUT A NANOMASK AND A LITHOGRAPHIC PROCESS
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机译:能够形成没有纳米掩模和光刻工艺的纳米粒子的纳米粒子形成方法
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摘要
PURPOSE: A nanopattern formation method is provided to facilitate process of various forms and/or large diameter substrates.;CONSTITUTION: A nanopattern formation method comprises the following steps: forming a mask layer which includes nanoagglomerates particles on a substrate(105); and forming nanopatterns(120) on the substrate by selectively etching the surface of the substrate from the opening. The nanoagglomerates are thermodynamically stable agglomerates and are voluntarily generated on the substrate. A separate thermal process is not accompanied to form nanoagglomerates.;COPYRIGHT KIPO 2013
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