Microforce measurement device, microforce measurement method and probe for measuring shape of microsurface

摘要

the measured object (1) and the probe contacts (1) with the tip in contact with the shaft (4) and, the probe shaft 4, the movable support means is provided for supporting the probe body in a non-contact state (21), and the probe shaft 4 to the measured object (1) moves toward the bias of the bias unit, the a biasing device that is inserted in the probe body 21 is a reaction force to act on the biasing force provided by the piezoelectric probe shaft ( ) sensor (8a) and a load detector for measuring the load acting on the piezoelectric sensor (8b ) and, based on the load detected by the load detector to a control unit (9) for adjusting the bias force of the bias unit, and in contact with the measured object 1 in the bias force is adjusted by the controller 9 that the position of the contact (2) and a displacement amount measuring device for measuring.