A micro accelerometer using a liquid metal droplet and Fabry-Perot interferometry

摘要

PURPOSE: A micro-accelerometer using a liquid metal droplet and a Fabry-Perot interferometer is provided to improve acceleration detection performance while maintaining the merits of the existing micro-accelerometer and to detect and measure the acceleration, generated when a measurement object moves on a two-dimensional plane or in a three-dimensional space, for each input axis of the measurement object at the same time. CONSTITUTION: A micro-accelerometer using a liquid metal droplet and a Fabry-Perot interferometer includes a liquid metal droplet(20), a measurement chamber(30) where the liquid metal droplet moves in an inertial-force acting direction or is changeably accommodated, and an optical fiber(40). One end of the optical fiber is connected to the measurement chamber and the other end thereof is connected to an optical analyzer. [Reference numerals] (AA) Up; (BB) Rear; (CC) Right; (DD) Left; (EE) Front; (FF) Down