A PRESSURE INSENSITIVE MASS FLOW CONTROLLER, A PROCESS FLUID CONTROL ASSEMBLY, A FLUID CONTROL PANEL, A COMBINATION MANUAL/PNEUMATIC VALVE FOR A FLUID CONTROL ASSEMBLY, AND A METHOD OF PREVENTING A MASS FLOW CONTROLLER FROM PARTICIPATING IN CROSSTALK IN AN ARRAY OF MASS CONTROLLERS

摘要

cooperative manual / pneumatic shut-off valve (11) is disclosed. The valve housing 13 , disposed in the housing and a fluid inlet 19 and a valve chamber having a fluid outlet (21) (17) , diaphragm 23 , valve stem 25, the diaphragm and the fluid inlet and the fluid return valve from the first position to form a seal between the outlet port , the air pressure driving the actuator adapted to move to the second position in which a fluid inlet and a fluid outlet opening communicate with each other (29) , and regardless of the air pressure control signal , controlled by the actuator 2 includes a handle for moving the diaphragm manually from the position to the first position . Valve is a combination of the functionality of the manual valve and the pressure valve to reduce the size of the panel according to the length and thus the process fluid flow control assembly by the combination of a single member .