HIGH SPEED/HIGH RESOLUTION SPECTRAL/IMAGE MEASUREMENT SYSTEM USING AN ELECTROMAGNETIC WAVE OF AN OPTICAL BASED, CAPABLE OF ENHANCING A SPATIAL RESOLUTION AND IMPROVING A MEASURING SPEED

摘要

PURPOSE: A high speed/high resolution spectral/image measurement system using an electromagnetic wave of an optical based are provided to obtain a high spatial resolution, and to obtain a high signal to noise ratio without a loss of a light source.;CONSTITUTION: A high speed/high resolution spectral/image measurement system using an electromagnetic wave of an optical based comprise an optical system (110), a reflector (120), a scanning mirror (121), a THz wave generator (130), and an optical detector (190). The optical system focuses a laser generated in a laser unit, and makes an incident to a measurement object sample of a lower part of the THz wave generator and the reflector. The reflector is formed in a form of a pellicle or a form of a reflecting surface having a hole. The scanning mirror scans an incoming laser. The THz wave generator comprises an optical crystal, a support layer, a non-reflective coating layer, and a functional layer. The optical crystal generates a Thz wave, and the support layer protects an optical crystal, and the non-reflective coating layer reduces a loss of a laser light. The functional layer protects the measurement object sample, and passes the THz wave of a specific frequency. The optical detector generates an electric signal about a focused THz wave in the optical system.;COPYRIGHT KIPO 2013;[Reference numerals] (AA) Scanning; (BB) Optical crystal; (CC) Sample