NERPRERYVAEMOGO METHOD OF ION BEAM WITH CONSTANT carborane self-cleaning ion source and the component ION EXTRACTION SYSTEM EPA

摘要

1. A method for uninterrupted production carborane ion beam with a constant self-cleaning of the ion source and extracting an ion implanter component system consisting in the fact that the ionization chamber is fed working medium based carborane and strong oxidizers such as fluorine, or oxygen, or chlorine, or chemical compound containing one or more of these oxidizing agents or chemical compound of these materials with carbon or hydrogen, or carbon and hydrogen, which react chemically with products contaminated znyayuschimi ion extraction system and / or the inner surface of the ionization chamber and / or its components, to form volatile compounds, characterized in that the ionization chamber is fed working medium based carborane, wherein the atoms of strong oxidants included in the molecule of the working substance data strong oxidizing agents under certain conditions, released from the molecules of the working substance, chemically react with the products contaminating the ion extraction system and / or the inner surface of the ionization chamber, and / or its components, to form volatile compounds generated volatile compounds were removed by vacuum otkachkoy.2. A method according to claim 1, characterized in that the working substance is used 1,7-m-karborandikarbonovuyu acid (CHBO) and / or 1,2-o-karborandikarbonovuyu acid (CHBO) .3. A method according to claim 2, characterized in that the formation of carborane occurs in the discharge mode with the fragmentation of the working medium to form strong oxidants for self-cleaning and extraction of ions of carborane (CBH).