Coating system with devices for test - and service routines and method for carrying out test - and service routines in the case of coating systems

摘要

A method for carrying out a test routine for at least one component of a vacuum deposition apparatus (1), in which, during an inoperative period of at least one part - production process, a maintenance or a check of a routine at this part - production process participating component (7, 10, 20, 30) is carried out automatically and independently and in the case of a deviation of at least one determined test parameter from a target range or of a detected malfunction of the component (7, 10, 20, 30) a warning message (310, 610) is generated, whereby at least one during the checking of recorded measured value is compared with stored data and a warning message (310, 610) is generated when on the basis of a from the stored measured values and of the at least one in the current check measured measured value detected trends to a future fault or a future deviation of a test parameter from a predetermined target range may be closed and wherein an automatic, mutual testing of a plurality of components (20a, 20b) is carried out.