Acceleration sensor has detection unit, which is coupled with seismic mass such that amplitude of deflection movement along direction of deflection is greater than amplitude of detecting motion along direction of detection

摘要

The acceleration sensor (1) has a substrate (2), a seismic mass (10) and a detection unit (20), where the seismic mass is deflected due to an applied external acceleration in the form of a deflection movement (11) relative to the substrate along a direction of deflection (101). The detection unit is coupled with the seismic mass such that the amplitude of the deflection movement along the direction of deflection is greater than the amplitude of a detecting motion (21) along the direction of detection (102). An independent claim is included for an operating method for operation of an acceleration sensor.