首页> 外国专利> Producing silicon ingot, useful to produce silicon wafer, comprises e.g. placing seed preset on container bottom wall, and directionally solidifying silicon melt, where phase boundary is influenced such that tendency for twinning is reduced

Producing silicon ingot, useful to produce silicon wafer, comprises e.g. placing seed preset on container bottom wall, and directionally solidifying silicon melt, where phase boundary is influenced such that tendency for twinning is reduced

机译:可用于生产硅晶片的生产硅锭包括例如硅。将晶种预先放置在容器底壁上,并定向凝固硅熔体,影响相界,从而降低孪生趋势

摘要

Producing silicon ingot, comprises providing a container (2) for receiving silicon melt (3), comprising a bottom wall (5) and side walls (6), providing a temperature control device for controlling temperature field in the container, providing at least one sheet-like monocrystalline seed preset (7), arranging the seed preset on the bottom wall of the container, providing the silicon melt in the container, and directionally solidifying the silicon melt, where a phase boundary is influenced by controlling temperature field in the container, such that a tendency for twinning is reduced. Producing silicon ingot, comprises (a) providing a container (2) for receiving silicon melt (3), comprising a bottom wall (5) and side walls (6), (b) providing a temperature control device for controlling temperature field in the container, (c) providing at least one sheet-like monocrystalline seed preset (7) having an axial orientation comprising (110)-, (100)- or (111)-orientation, (d) arranging the seed preset on the bottom wall of the container, (e) providing the silicon melt in the container, and (f) directionally solidifying the silicon melt in the container, where a phase boundary for the liquid silicon melt is displaced in a growth direction, and the phase boundary is influenced by controlling the temperature field in the container using the temperature control device, such that a tendency for twinning is reduced.
机译:生产硅锭,包括提供用于容纳硅熔体(3)的容器(2),其包括底壁(5)和侧壁(6),提供用于控制容器中的温度场的温度控制装置,提供至少一个片状单晶晶种预设(7),将晶种预设放置在容器的底壁上,在容器中提供硅熔体,并定向凝固硅熔体,其中,通过控制容器中的温度场来影响相界,从而减少了孪生的趋势。生产硅锭,包括:(a)提供用于容纳硅熔体(3)的容器(2),其包括底壁(5)和侧壁(6),(b)提供用于控制容器中的温度场的温度控制装置。容器,(c)提供至少一个片状单晶种子预设(7),其轴向取向包括(110)-,(100)-或(111)-取向,(d)将种子预设排列在底壁上在容器的内部,(e)在容器中提供硅熔体,以及(f)在容器中定向凝固硅熔体,其中液态硅熔体的相界在生长方向上移动,并且该相界受到影响通过使用温度控制装置控制容器中的温度场,从而降低了孪生的趋势。

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